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Isingeniso:
Embonini ye-semiconductor ethuthuka ngokushesha,amaphampu vacuumziye zavela njengezingxenye ezibalulekile ohlelweni lokukhiqiza.Lawa maphampu anesibopho sokudala nokugcina amazinga e-vacuum adingekayo ukuze kukhiqizwe ama-semiconductors ekhwalithi ephezulu.Ukuthuthukisa ukusebenza kahle nokuthembeka kwamaphampu evacuum, ukufakwa kwezingxenye zokudlulisa amandla ezithuthukisiwe, njengeukukhiya imihlanganofuthiama-couplings we-shaft, ibonakale ibalulekile.
Ukuqonda kweAmaphampu weVacuum:
Amaphampu e-vacuum amathuluzi emishini aklanyelwe ukususa amagesi nokudala indawo ye-vacuum ngaphakathi kwegumbi elivaliwe.Lesi sikhala sibalulekile ezinqubweni ezihlukahlukene zokukhiqiza ama-semiconductor, okuhlanganisa ukubeka, ukuhlanganisa, kanye ne-metrology.Amaphampu e-vacuum asiza ukulawula okunembile kwamazinga okucindezela, aqinisekisa ubuqotho kanye nekhwalithi yokwenziwa kwe-semiconductor.
Amaphampu weVacuum
Iqhaza likaIzingxenye Zokudluliswa kwamandla:
Ama-Locking Assemblies:
Ukukhiya imihlanganozingamathuluzi aqinile, athembeke kakhulu asetshenziselwa ukuvikeleka kwezingxenye kumashafu ajikelezayo.Kuipompo ye-vacuumizinhlelo zokusebenza, imihlangano yokukhiya idlala indima ebalulekile ekuqinisekiseni ukuxhumana okuphephile phakathi kwe-motor shaft kanye ne-pump impeller noma i-rotor.Baqeda ubungozi bokushelela noma ukungahlangani, okungaholela ekungasebenzini kahle noma ukwehluleka okuyinhlekelele.
Ngokusabalalisa ngokulinganayo i-torque eduze kwe-shaft, imihlangano yokukhiya ithuthukisaukudluliswa kwamandlaukusebenza kahle, ukunciphisa ukudlidliza, nokunciphisa ingozi yokungaqondani kahle.Lezi zingxenye ziphinde zinikeze amandla okulungisa i-axial kanye ne-radial, okuvumela ukufakwa kalula nokuqondanisa okunembile kwezingxenye zephampu.Ukwengeza, izakhiwo zabo ezigxile kuzo zenza kube lula ukulungiswa futhi zinciphise isikhathi sokuphumula, okunomthelela ekwandeni kokukhiqiza ezinqubweni zokukhiqiza ze-semiconductor.
Ukuhlanganiswa kwe-Shaft:
Ama-couplings we-shaftyizici ezibalulekile ezixhuma ama-shafts amabili ajikelezayo, i-torque ehambisayo ngenkathi ivumela ukungahambi kahle.Kuipompo ye-vacuumizinhlelo zokusebenza, ukuxhunyaniswa kwe-shaft kusiza ukudluliswa okuphumelelayo kwamandla ukusuka ku-motor ukuya epompo, ukuqinisekisa ukusebenza kahle nokunciphisa ukulahlekelwa kwamandla.
Ngokunxephezela ukungaqondi kahle okubangelwa ukwanda okushisayo, ukudlidliza, noma amaphutha omhlangano, ukuhlangana kwe-shaft kuvikela ipompo nezingxenye zemoto ekucindezelekeni ngokweqile, kunciphisa ukuguga nokudabuka.Lokhu kubangela ubude besikhathi bemishini enwetshiwe, ukwethembeka okuthuthukisiwe, nokusebenza kwesistimu okuthuthukisiwe.Ukwengeza, ama-shaft couplings asiza ekudambiseni ukudlidliza, athuthukise ukuzinza futhi anciphise nengozi yokwehluleka kwemishini.
Ama-couplings ama-shaft amaphampu e-vacuum
Isiphetho:
Embonini ye-semiconductor, lapho ukunemba nokuthembeka kubaluleke kakhulu, ukusetshenziswa kokuthuthukisiweizingxenye zokudlulisa amandla, njengeukukhiya imihlanganofuthiama-couplings we-shaft, iwusizo ekwenzeni ngcono ukusebenza kweamaphampu vacuum.Lezi zingxenye ziqinisekisa ukuxhumana okuphephile, zinika amandla ukudluliswa kwamandla okuphumelelayo futhi zinikeze ukuguquguquka ukuze kuhlangatshezwane nokungahambi kahle kanye nokudambisa ukudlidliza.
Njengoba imboni ye-semiconductor iqhubeka nokuthuthuka, isidingo seamaphampu vacuumngokusebenza okuthuthukisiwe, ukwethembeka, kanye nokukhiqiza kuzoqhubeka.Ukufakwa kwezindawo zokukhiya ezisezingeni eliphezulu kanye nama-shaft couplings kuzodlala indima ebaluleke kakhulu ekuhlangabezaneni nalezi zidingo, kube nesandla ekukhiqizeni okungenazihibe kwama-semiconductors ekhwalithi ephezulu.
Isikhathi sokuthumela: May-24-2023